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US 2025/0144757 A1Published application
Holding member and method of manufacturing holding member
AssigneeNiterra Co., Ltd.
InventorsHideki UEMATSU, Yuya MINAMIHATA
Life of this patent
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Abstract
A holding member contains alpha-type alumina as a main component and is configured to hold a target object. The holding member has a holding surface that is a surface on which the target object is to be held. The holding surface has a projection and a recess formed thereon and therein. A bottom surface that defines a bottom portion of the recess contains gamma-type alumina.
Claims5
A holding member that contains alpha-type alumina as a main component and that is configured to hold a target object,
- wherein the holding member has a holding surface that is a surface on which the target object is to be held,
- wherein the holding surface has a projection and a recess formed thereon and therein, and
- wherein a bottom surface that defines a bottom portion of the recess contains gamma-type alumina.
A method of manufacturing a holding member, the method comprising:
- a recess formation step of forming a recess in a processing target surface of a member, the member containing alpha-type alumina as a main component, by irradiating the processing target surface with an ultrashort pulse laser beam.
Dependencies are inferred from the claim text.