Deposition mask and method for manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsJeong Kuk KIM, Sung Won CHO, Jun Ho JO
Life of this patent
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Abstract
A deposition mask includes a silicon substrate including cell areas and a mask frame area excluding the cell areas, the mask frame area including a mask rip area partitioning the cell areas and an outer frame area disposed at an outermost portion of the silicon substrate, a mask rip disposed in the mask rip area, a mask membrane disposed in each of the cell areas, a first metal frame disposed in the outer frame area, and a second metal frame surrounding an outer portion of the silicon substrate and connected to the first metal frame.
Claims20
A deposition mask comprising:
- a silicon substrate including:
- a plurality of cell areas;
- a mask frame area excluding the plurality of cell areas, the mask frame area including a mask rip area partitioning the plurality of cell areas;
- and
- an outer frame area disposed at an outermost portion of the silicon substrate;
- a mask rip disposed in the mask rip area;
- a mask membrane disposed in each of the plurality of cell areas;
- a first metal frame disposed in the outer frame area;
- and
- a second metal frame surrounding an outer portion of the silicon substrate and connected to the first metal frame.
A method for manufacturing a deposition mask, the method comprising:
- preparing a silicon substrate including a plurality of cell areas and a mask frame area excluding the plurality of cell areas, the mask frame area including a mask rip area partitioning the plurality of cell areas and an outer frame area disposed at an outermost portion of the silicon substrate;
- forming a mask membrane and a first metal frame by performing a plating process;
- forming a cell opening corresponding to the plurality of cell areas and a frame opening exposing a lower surface of the first metal frame by etching a rear surface of the silicon substrate;
- aligning a second metal frame surrounding an outer portion of the silicon substrate with the silicon substrate;
- and
- connecting the first metal frame and the second metal frame to each other.
Dependencies are inferred from the claim text.