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US 2025/0144574 A1Published application
Filtration membranes, systems, and methods for producing purified water
AssigneeEntegris, Inc.
InventorsJames Hamzik, Siddarth Sampath, Justin Brewster, Ashutosh Shrikant Bhabhe
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Abstract
Described are filter membranes, related systems, and related method useful for producing purified (e.g., ultrapure) water, including membranes, systems, and methods of preparing purified water that will be useable in processes of manufacturing electronic and semiconductor devices.
Claims15
A system useful for removing an impurity from a flow of source water, the system comprising:
- (i) a first porous polymeric filter membrane having attached thereon an amino polyol ligand comprising three or more hydroxyl groups;
- (ii) a second porous polymeric filter membrane configured to remove solid particulate contaminants;
- and
- (iii) an ion-exchange resin.
1 more element
Dependencies are inferred from the claim text.