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US 2025/0141172 A1Published application
Laser device and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorsYoichi SASAKI, Osamu WAKABAYASHI
Life of this patent
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Abstract
A laser device includes a laser chamber configured to accommodate laser gas including fluorine, a pair of discharge electrodes arranged inside the laser chamber, a gas supply port arranged in the laser chamber, and an XeF2 crystal to be vaporized as being arranged in an XeF2 vaporization space communicating with the gas supply port.
Claims20
A laser device comprising:
- a laser chamber configured to accommodate laser gas including fluorine;
- a pair of discharge electrodes arranged inside the laser chamber;
- a gas supply port arranged in the laser chamber;
- and
- an XeF2 crystal to be vaporized as being arranged in an XeF2 vaporization space communicating with the gas supply port.
2 more elements
An electronic device manufacturing method, comprising:
- generating laser light using a laser device;
- outputting the laser light to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
- the laser device including:
- a laser chamber configured to accommodate laser gas including fluorine;
- a pair of discharge electrodes arranged inside the laser chamber;
- a gas supply port arranged in the laser chamber;
- and an XeF2 crystal to be vaporized as being arranged in an XeF2 vaporization space communicating with the gas supply port.
6 more elements
Dependencies are inferred from the claim text.