Pressure sensor
AssigneeYokogawa Electric Corporation
InventorsNobuyuki Hamamatsu, Hiroshi YOKOUCHI, Ryosuke KANEKO, Takashi YOSHIDA
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AssigneeYokogawa Electric Corporation
InventorsNobuyuki Hamamatsu, Hiroshi YOKOUCHI, Ryosuke KANEKO, Takashi YOSHIDA
Estimating the term…
A pressure sensor includes: a pressure receiver having a diaphragm portion that is deformed by receiving pressure on a pressure receiving surface thereof, and a rim portion formed around and integrally with the diaphragm portion and formed to be thicker than the diaphragm portion; and a semiconductor substrate that is connected to a reverse surface of the pressure receiving surface and detects strain in the diaphragm portion by means of a resonating strain gauge. The pressure receiver is formed of ceramic. The semiconductor substrate has: a base portion provided to face the reverse surface; and a connected portion that protrudes from the base portion toward the reverse surface and has a connected surface connected to the reverse surface. The connected portion has an area smaller than an area of the base portion in a case where the pressure sensor is viewed from a direction perpendicular to the reverse surface.
A pressure sensor, comprising:
Dependencies are inferred from the claim text.