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US 2025/0128288 A1Published application
Ultrasonic sensor and manufacturing method thereof
AssigneeQisda Corporation
InventorsFu-Sheng Jiang, Pei-Lun Song
Life of this patent
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Abstract
An ultrasonic sensor has a capacitance micromachined ultrasonic transducer (CMUT) with three metal layers and four insulating layers. A first metal layer receives a reference voltage, a second metal layer receives a direct current voltage, and a third metal layer receives an alternating current voltage. A cavity formed between the first metal layer and the second metal layer allows for mechanical vibration of the CMUT, which generates ultrasonic waves.
Claims10
An ultrasonic sensor, comprising:
- a substrate;
- a first metal layer formed on the substrate, a first portion of the first metal layer being used to receive a reference voltage;
- a first insulating layer formed on the first metal layer;
- a second insulating layer forming a first cavity with the first insulating layer;
- a second metal layer formed on the second insulating layer, a first portion of the second metal layer being used to receive a direct-current (DC) voltage different from the reference voltage;
- a third insulating layer formed on the second metal layer;
- a third metal layer formed on the third insulating layer, a first portion of the third metal layer being used to receive an alternating-current (AC) voltage;
- and
- a fourth insulating layer formed on the third metal layer;
- wherein the first portion of the first metal layer, the first cavity, the first portion of the second metal layer, and the first portion of the third metal layer form a capacitance micromachined ultrasonic transducer (CMUT).
7 more elements
A method for manufacturing an ultrasonic sensor, comprising:
- providing a substrate;
- forming a first metal layer on the substrate, the first metal layer comprising a first portion and a second portion;
- forming a first insulating layer on the first metal layer;
- forming a semiconductor layer on the substrate and the second portion of the first metal layer;
- forming a first sacrificial layer on the first insulating layer;
- forming a second insulating layer on the first sacrificial layer;
- removing the first sacrificial layer to form a first cavity between the first insulating layer and the second insulating layer;
- forming a second metal layer on the second insulating layer;
- forming a third insulating layer on the second metal layer;
- forming a third metal layer on the third insulating layer;
- and
- forming a fourth insulating layer on the third metal layer.
9 more elements
Dependencies are inferred from the claim text.