Improved optical access for spectroscopic monitoring of semiconductor processes

Abstract

The disclosure recognizes the advantage of improved optical access for spectroscopic monitoring of, for example, semiconductor processing. In one aspect the disclosure provides a gas distributor that can be used within a processing chamber. Unlike conventional gas distributors, the disclosed gas distributor includes one or more optically transmissive sections for improved optical access the chamber. In one example, the gas distributor includes: (1) an opaque section including a first set of gas distribution holes and (2) at least one optically transmissive section coupled to the opaque section and positioned to receive light through a window of the chamber.

Dependencies are inferred from the claim text.