Flow modification fixture for an equipment front end module
AssigneeEntegris, Inc.
InventorsSeong Chan Kim, Gregory Allan Schelske
Life of this patent
Estimating the term…
Abstract
An equipment front end module. An equipment front end module (EFEM) includes a flow modification feature projecting away from an interior wall of the equipment front end module and extending into an interior of the equipment front end module (EFEM) at an angle. The flow modification feature modifies the flow of gas flowing from a top to a bottom of the EFEM by deflecting gas flow away and/or laminarizing gas flow across an opening of the EFEM, which may improve the purge performance of a wafer carrier docked at the EFEM.
Claims14
A flow modification fixture for modifying gas flow inside an equipment front end module used in the processing of silicon wafers, the fixture comprising a material positioned above within an opening of an equipment front end module, wherein the material deflects gas flow away from the opening of the equipment front end module and the material induces laminar flow across the opening of the equipment front end module using a plurality of apertures in the material, wherein the fixture partially extends into the interior of the equipment front end module.
A flow modification feature for modifying gas flow inside an equipment front end module used in the processing of silicon wafers, the fixture comprising:
- a fixture comprising a plurality of openings configured to be connected to an interior wall and above an opening of an equipment front end module, the fixture having a first portion positioned adjacent a second portion at an angle, the first portion sized to extend along the opening of the opening of the equipment front end module and the second portion sized to partially extend into the equipment front end module interior at a distance that is that is sufficient to deflect gas flow away from the opening of the equipment front end module inside the equipment front end module, wherein the fixture induces a laminar flow of gas over the opening of the equipment front end module using the plurality of openings, wherein the fixture extends into the interior of the equipment front end module.
Dependencies are inferred from the claim text.