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US 2025/0110398 A1Published application
Imprint Device and Imprint Method
AssigneesScivax Corporation, Shin-Etsu Chemical Co., Ltd.
InventorsYukiko Kondo, Satoru Tanaka
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Abstract
The present disclosure provides an imprinting device and an imprinting method. The present disclosure also provides a stamp comprising a resin-made molding component.
Claims11
A stamp comprising a resin-made molding component formed on a substrate,
- wherein the resin-made molding component comprises:
- a surface provided with a pattern;
- a side face extending from the surface provided with the pattern to the substrate;
- and
- a circumferential portion extending from the side face toward an external edge of the substrate.
2 more elements
Dependencies are inferred from the claim text.