Mems metamaterial and mems device incorporating the mems metamaterial

A device, comprising:

• a substrate;
• and
• a suspended structure including an elementary cell positioned at a distance from the substrate along a first direction,
• wherein the elementary cell further includes:
• a first structural region including a first material containing silicon and having a first side facing the substrate and a second side opposite to the first side;
• and
• a second structural region including a second material containing metal positioned on the second side of the first structural region.

A device, comprising:

• a substrate;
• and
• a suspended structure including an elementary cell positioned at a distance from the substrate along a first direction,
• wherein the elementary cell further includes:
• a first structural region containing silicon, the first structural region further including a plurality of border portions positioned transversely to each other,
• a second structural region containing metal on the first structural region;
• and
• a constraint structure positioned between and coupled to two or more border portions of the first structural region.