Backside bi-directional interconnect
AssigneeQUALCOMM Incorporated
InventorsYan SUN, Deepak SHARMA, Shreesh NARASIMHA
Life of this patent
Estimating the term…
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AssigneeQUALCOMM Incorporated
InventorsYan SUN, Deepak SHARMA, Shreesh NARASIMHA
Estimating the term…
Disclosed are techniques for a semiconductor structure. In an aspect, a semiconductor structure includes a gate stack including a first gate structure and a second gate structure offset in a first direction. The semiconductor structure includes a first source/drain (S/D) structure adjacent the first gate structure, a second S/D structure adjacent the second gate structure, a first backside conductive structure in contact with the first S/D structure, and a second backside conductive structure in contact with the second S/D structure. The semiconductor structure includes a third backside conductive structure disposed in a back portion of the semiconductor structure opposing a front portion of the semiconductor structure, extending along a second direction, and in contact with the first backside conductive structure and the second backside conductive structure.
A semiconductor structure, comprising:
A method of manufacturing a semiconductor structure, comprising:
An electronic device, comprising:
Dependencies are inferred from the claim text.