Integrated circuit structures with patch spacers
AssigneeIntel Corporation
InventorsGuowei XU, Feng ZHANG, Chiao-Ti HUANG, Robin CHAO, Tao CHU, Chung-Hsun LIN, Oleg GOLONZKA, Yang ZHANG, Ting-Hsiang HUNG, Chia-Ching LIN, Anand S. MURTHY
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