Method for generating extreme ultraviolet light, extreme ultraviolet light source assembly and optical system

Abstract

The embodiment of the present disclosure provides a method for generating an extreme ultraviolet light, an extreme ultraviolet light source assembly, and an optical system. The method for generating an extreme ultraviolet light includes: generating a plasma by using a magnetic confinement device; controlling, if the plasma meets a preset injection condition, a heavy metal injection device to inject a designated heavy metal into the magnetic confinement device, so that the designated heavy metal interacts with the plasma in the magnetic confinement device to generate an extreme ultraviolet light; controlling an optical device to collect the extreme ultraviolet light. As the magnetic confinement device that meets the requirements of generating an extreme ultraviolet light has a low cost, simple and stable operation, and a high electro-optic conversion efficiency, with the above method for generating an extreme ultraviolet light, the stability of an extreme ultraviolet light is improved and the cost of generating an extreme ultraviolet light is reduced.

Dependencies are inferred from the claim text.