Light intensity modulation device and waveform compression device

A waveform compression device comprising:

• a light distributor to split a pulsed beam;
• a light sensor to convert a first pulsed beam split by the light distributor into an electric signal;
• an analog-to-digital converter to convert the electric signal resulting from conversion by the light sensor, which is an analog signal, into a digital signal;
• a correction superimposition waveform calculator to calculate correction superimposition waveform data which is waveform data representing any light intensity waveform, taking into consideration a distortion due to a temporal intensity fluctuation of a pulsed beam, on a basis of any superimposition waveform data and the electric signal resulting from conversion by the analog-to-digital converter, so that a value of the electric signal equivalent to a minimum value of the electric signal in a zone of the electric signal equivalent to a zone of the pulsed beam in which there is a possibility that a temporal intensity fluctuation has been generated in the pulsed beam, or an average value of a value of the electric signal equivalent to the minimum value becomes an upper limit value in a full-scale range of an intensity-modulated beam;
• a digital-to-analog converter to convert the correction superimposition waveform data calculated by the correction superimposition waveform calculator, which is a digital signal, into an analog signal;
• a light intensity modulator to obtain an intensity-modulated beam having any waveform, by superimposing the correction superimposition waveform data resulting from conversion by the digital-to-analog converter onto a second pulsed beam split by the light distributor;
• a pulsed beam compressor to obtain a compressed pulsed beam by compressing the intensity-modulated beam obtained by the light intensity modulator;
• and
• a second light sensor to convert the compressed pulsed beam obtained by the pulsed beam compressor into an electric signal.