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AssigneesBeijing Boe Optoelectronics Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsLihui WANG, Yue LI, Qiuxu WEI, Yanfei REN, Yuelei XIAO, Yulin FENG, Xue CAO, Kidong HAN, Wenbo CHANG, Yifan WU, Qichang AN, Huiying LI, Yi ZHOU, Feng QU
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The present disclosure provides a hybrid filter, a preparation method thereof, and a filtering apparatus. The hybrid filter includes a first substrate (100) and a second substrate (200) disposed oppositely, a first space (300) is disposed between the first substrate (100) and the second substrate (200), at least one of the first substrate (100) and the second substrate (200) is provided with a film bulk acoustic resonator (30), at least one of the first substrate (100) and the second substrate (200) is provided with at least one passive filter (40), the film bulk acoustic resonator (30) is disposed in the first space (300) and is connected with the passive filter (40), the passive filter (40) includes a filtering inductor and a filtering capacitor, and the filtering inductor has a three-dimensional spiral inductor structure.
A hybrid filter, comprising a first substrate and a second substrate disposed oppositely, wherein a first space is disposed between the first substrate and the second substrate, at least one of the first substrate and the second substrate is provided with a film bulk acoustic resonator, at least one of the first substrate and the second substrate is provided with at least one passive filter, the film bulk acoustic resonator is disposed in the first space and connected with the passive filter, the passive filter comprises a filtering inductor and a filtering capacitor, and the filtering inductor has a three-dimensional spiral inductor structure.
(canceled)
A preparation method of a hybrid filter, comprising:
Dependencies are inferred from the claim text.