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US 2025/0096770 A1Published application
Composite substrate and method for producing composite substrate
AssigneeNGK Insulators, Ltd.
InventorsTakahiro YAMADERA, Yuji HORI
Life of this patent
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Abstract
A composite substrate includes: a support substrate having an upper surface and a lower surface that are opposed to each other; a piezoelectric layer arranged on the upper surface side of the support substrate; and an intermediate layer arranged between the support substrate and the piezoelectric layer, wherein, in an end portion of the support substrate on the upper surface side, a low crystalline region having a lower crystallinity as compared to a region positioned on the lower surface side is formed.
Claims7
A composite substrate, comprising:
- a support substrate having an upper surface and a lower surface that are opposed to each other;
- a piezoelectric layer arranged on the upper surface side of the support substrate;
- and
- an intermediate layer arranged between the support substrate and the piezoelectric layer,
- wherein, in an end portion of the support substrate on the upper surface side, a low crystalline region having a lower crystallinity as compared to a region positioned on the lower surface side is formed.
2 more elements
A method of producing a composite substrate, comprising in this order:
- forming a damage region in an end portion of a support substrate on an upper surface side, the support substrate having the upper surface and a lower surface that are opposed to each other;
- and
- joining a piezoelectric substrate to the upper surface side of the support substrate via an intermediate layer.
Dependencies are inferred from the claim text.