Chamber for gas laser device, gas laser device, and electronic device manufacturing method

A gas laser device including a chamber that encloses a laser gas at an internal space thereof,

• the chamber comprising:
• a first main electrode and a second main electrode arranged with a longitudinal direction thereof being along a predetermined direction as being spaced apart from and facing each other in the internal space;
• a window arranged at a wall surface of the chamber and configured to transmit light from the internal space;
• and
• a first preionization electrode arranged beside one side of the first main electrode,
• the first preionization electrode including a first dielectric pipe extending along the longitudinal direction, a first preionization inner electrode arranged in the first dielectric pipe and extending along the longitudinal direction, and a first preionization outer electrode extending along the longitudinal direction, including a first end portion facing an outer circumference surface of the first dielectric pipe, and extending from the first end portion in a direction away from the first dielectric pipe, and
• in a plane perpendicular to the longitudinal direction, a first corona discharge angle, as facing a space between the first main electrode and the second main electrode among angles formed by a first tangent in contact with the first dielectric pipe at a first predetermined position of the first dielectric pipe closest to the first end portion and a straight line that passes through the first predetermined position and extends in a direction in which the first preionization outer electrode extends from the first end portion, being an acute angle.

An electronic device manufacturing method, comprising:

• generating laser light using a gas laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the gas laser device including a chamber for the gas laser device having an internal space in which a laser gas is enclosed,
• the chamber including:
• a first main electrode and a second main electrode arranged with a longitudinal direction thereof being along a predetermined direction as being spaced apart from and facing each other in the internal space;
• a window arranged at a wall surface of the chamber and configured to transmit light from the internal space;
• and
• a first preionization electrode arranged beside one side of the first main electrode,
• the first preionization electrode including a first dielectric pipe extending along the longitudinal direction, a first preionization inner electrode arranged in the first dielectric pipe and extending along the longitudinal direction, and a first preionization outer electrode extending along the longitudinal direction, including a first end portion facing an outer circumference surface of the first dielectric pipe, and extending from the first end portion in a direction away from the first dielectric pipe, and
• in a plane perpendicular to the longitudinal direction, a first corona discharge angle, as facing a space between the first main electrode and the second main electrode among angles formed by a first tangent in contact with the first dielectric pipe at a first predetermined position of the first dielectric pipe closest to the first end portion and a straight line that passes through the first predetermined position and extends in a direction in which the first preionization outer electrode extends from the first end portion, being an acute angle.