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US 2025/0096449 A1Published application
Acoustic waveguide with diffraction grating
OwnerBichoy BAHR, Benjamin Stassen COOK +1inventors
InventorsBichoy BAHR, Benjamin Stassen COOK, Scott R. SUMMERFELT
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Abstract
In some examples, a package includes a semiconductor die having a first surface and a second surface opposing the first surface, the semiconductor die including circuitry in the first surface. The package also includes an acoustic waveguide in the semiconductor die, the acoustic waveguide including an array of capacitors and a connector coupling the circuitry to the acoustic waveguide.
Claims20
A package, comprising:
- a semiconductor die having a first surface and a second surface opposing the first surface, the semiconductor die including circuitry in the first surface;
- an acoustic waveguide in the semiconductor die, the acoustic waveguide including an array of capacitors;
- and
- a connector coupling the circuitry to the acoustic waveguide.
1 more element
A device comprising:
- a semiconductor die;
- and
- an acoustic waveguide including an array of piezoelectric capacitors in the semiconductor die, the array of piezoelectric capacitors comprising:
- a first portion comprising first piezoelectric capacitors, the first piezoelectric capacitors having a first size;
- a second portion adjacent the first portion, the second portion comprising second piezoelectric capacitors, the second piezoelectric capacitors having a second size, the second size smaller than the first size;
- and
- a third portion adjacent the second portion, the third portion comprising a first row of third piezoelectric capacitors and a second row of fourth piezoelectric capacitors, the third piezoelectric capacitors having a third size, fourth piezoelectric capacitors having a fourth size, the fourth size different than the third size.
4 more elements
A package comprising:
- a semiconductor die having a surface;
- and
- an acoustic waveguide in the semiconductor die, the acoustic waveguide including an array of capacitors, the array of capacitors including a transducer portion and a diffraction grating portion, the transducer portion configured to produce first acoustic waves based on receiving first electrical signals and to produce second electrical signals based on receiving second acoustic waves, the diffraction grating portion configured to direct the first acoustic waves toward the surface and to receive the second acoustic waves from the surface.
Dependencies are inferred from the claim text.