Semiconductor device and method of manufacturing semiconductor device
AssigneeSK hynix Inc.
InventorsRho Gyu KWAK, In Su PARK, Jung Shik JANG, Seok Min CHOI, Won Geun CHOI
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AssigneeSK hynix Inc.
InventorsRho Gyu KWAK, In Su PARK, Jung Shik JANG, Seok Min CHOI, Won Geun CHOI
Estimating the term…
A semiconductor device may include a source structure, a support structure positioned on the source structure and including a first inclined surface extending in a second direction crossing the first direction, a gate structure positioned on the source structure and the support structure and including conductive layers and insulating layers alternately stacked, channel structures extending through the gate structure and connected to the source structure, and a slit structure extending in the first direction through the gate structure, wherein each of the conductive layers includes a second inclined surface extending in the second direction.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.