SRAM Middle Strap with Feedthrough Via
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJui-Lin CHEN, Feng-Ming CHANG, Ping-Wei WANG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJui-Lin CHEN, Feng-Ming CHANG, Ping-Wei WANG
Estimating the term…
An integrated circuit includes a first SRAM cell and a second SRAM cell, each including a plurality of field-effect transistors (FETs), a front metal line over the FETs and a back metal line below the FETs, and a middle strap area disposed between the first SRAM cell and the second SRAM cell. The middle strap area includes a plurality of gate stacks extending lengthwise along a direction, a gate isolation structure extending through a gate stack of the plurality of gate stacks, a feedthrough via (FTV) embedded in the gate isolation structure, a first dielectric gate disposed between the conductive structure and the first SRAM cell, and a second dielectric gate disposed between the conductive structure and the second SRAM cell. The FTV electrically couples the front metal line and the back metal line.
An integrated circuit, comprising:
An integrated circuit, comprising:
An integrated circuit, comprising:
Dependencies are inferred from the claim text.