Substrate processing systems and methods using virtual machine architecture for operating substrate processing chambers

A substrate processing system, comprising:

• a first substrate handling chamber including a first robotic arm;
• a first substrate processing chamber coupled with the first substrate handling chamber via a first gate valve, wherein a portion of the first robotic arm is configured to extend through the first gate valve and into the first substrate processing chamber to move substrates into and out of the first substrate processing chamber;
• a second substrate processing chamber coupled with the first substrate handling chamber via a second gate valve, wherein the portion of the first robotic arm is configured to extend through the second gate valve and into the second substrate processing chamber to move substrates into and out of the second substrate processing chamber;
• a front end module configured to receive unprocessed substrates for processing and to hold processed substrates prior to removal from the substrate processing system;
• a first load lock module connecting the front end module and the first substrate handling chamber, wherein the first load lock module is configured to hold substrates moving between the front end module and the first substrate handling chamber;
• and
• a platform computer provided with the front end module or the first load lock module, the platform computer being located remote from and in electronic communication with the first substrate processing chamber and the second substrate processing chamber, the platform computer:
• (a) including memory storing first process module software for operating the first substrate processing chamber and second process module software for operating the second substrate processing chamber, (b) transmitting signals for operating the first substrate processing chamber based on data generated by the first process module software, and (c) transmitting signals for operating the second substrate processing chamber based on data generated by the second process module software.

A method of operating a substrate processing system, the method comprising:

• operating a first substrate processing chamber using first operating instructions generated by first process module software stored in memory on a platform computer located remote from and in electronic communication with the first substrate processing chamber;
• operating a second substrate processing chamber using second operating instructions generated by second process module software stored in the memory on the platform computer located remote from and in electronic communication with the second substrate processing chamber;
• creating first replacement process module software;
• storing the first replacement process module software in the memory of the platform computer;
• replacing the first process module software with the first replacement process module software;
• and
• operating the first substrate processing chamber using operating instructions generated by the first replacement process module software stored in the memory on the platform computer.