Substrate processing apparatus and treatment solution supply unit

A treatment solution supply unit for supplying a treatment solution to process a substrate, the treatment solution supply unit comprising:

• a tank for storing the treatment solution;
• a liquid supply line for supplying a treatment solution in the tank to a liquid discharge unit;
• a vent line connected to the tank to discharge water-containing gas in the tank;
• a heater for heating the treatment solution in the tank or the treatment solution circulating from the tank;
• and
• a condensate discharge line connected to the vent line to discharge condensate generated from the water-containing gas.

An apparatus for processing a substrate, the apparatus comprising:

• a chamber having a processing space for processing a substrate;
• a support unit disposed in the processing space and for supporting the substrate;
• a liquid discharge unit for supplying a treatment solution to the substrate and processing the substrate when processing the substrate;
• and
• a liquid supply unit for supplying a treatment solution to the liquid discharge unit,
• wherein the liquid supply unit includes:
• a tank for storing the treatment solution;
• a liquid supply line for supplying the treatment solution in the tank to the liquid discharge unit;
• a vent line connected to the tank to discharge water-containing gas in the tank;
• a heater for heating the treatment solution in the tank or the treatment solution circulating from the tank;
• and
• a condensate discharge line connected to the vent line to discharge condensate generated from the water-containing gas,
• the treatment solution is a liquid containing a chemical and moisture, and
• the vent line includes:
• a first line connected to the tank;
• a second line extending from the first line and inclined downwardly toward a downstream direction;
• and
• a third line extending from the second line and inclined upwardly in a downstream direction, and
• the condensate discharge line is connected to the vent line at a point where the second line and the third line are connected.