Electronic component and charged particle beam irradiation apparatus

An electronic component comprising:

• a first substrate including
• a plurality of first through holes, each of a plurality of charged particle beams passes through each of the plurality of first through holes,
• a first substrate plane, and
• a second substrate plane provided on the opposite side of the first substrate plane;
• a plurality of electrode pairs, each of the plurality of electrode pairs being provided in each of the plurality of first through holes, and each of the plurality of electrode pairs including
• a first electrode including
• a first portion,
• a second portion connected to the first portion, and the second portion including a first end, and
• a third portion connected to the first portion, and the third portion including a second end, and
• a second electrode spaced apart from the first electrode, the second electrode facing the first electrode, and the second electrode including
• a fourth portion facing the first portion,
• a fifth portion connected to the fourth portion, the fifth portion including a third end, and the third end facing the first end, and
• a sixth portion connected to the fourth portion, the sixth portion including a fourth end, and the fourth end facing the second end;
• an insulating film, at least a part of the insulating film being provided between an inner side surface of each of the first through holes and an outer side surface of the first electrode and between the inner side surface of each of the first through holes and an outer side surface of the second electrode;
• wherein a surface of the insulating film exposed from the first electrode and the second electrode in the vicinity of the first end and the third end is located outside of a first surface and a third surface, the first surface is an inner surface of the second portion, and the third surface is an inner surface of the fifth portion, and
• wherein the surface of the insulating film exposed from the first electrode and the second electrode in the vicinity of the second end and the fourth end is located outside of a fifth surface and a seventh surface, the fifth surface is an inner surface of the third portion, and the seventh surface is an inner surface of the sixth portion.