US 2025/0095178 A1 · METHOD AND DEVICE FOR MEASUREMENTS OF OPTICAL SAMPLES BY MEANS OF VISION RAYS

Abstract

In some embodiments, the present invention comprises a new metrology device (apparatus) comprising a camera, an optical imaging system, and a reference target for the non-destructive evaluation of samples as well as methods and systems thereto. In some embodiments, the device includes a methodology to measure vision rays that enter the optical system at a specific angle by analyzing the patterns of a reference target at different locations. This apparatus also allows measuring the vision rays deflected by samples placed in front of the optical system. The deflection may have occurred through refraction by transparent samples or by reflection of reflective samples. The obtained vision rays provide information on the geometric wavefront, and hence, the sample surface.

Claims20

Dependent claims

An apparatus for measuring optical characteristics of an object using vision rays, the apparatus comprising:

an optical imaging system comprising:
a camera;
a reference target system;
and
a translation stage;
and
one or more processors operationally coupled with the optical imaging system, wherein the one or more processors are configured to cause the apparatus to:
perform a first one or more adjustments to a linear position of the reference target system relative to the camera via the translation stage;
and
generate a plurality of vision rays at a plurality of distances between the camera and the reference target system based at least in part on the first one or more adjustments, wherein the plurality of vision rays originates from one or more pixels of the camera.

7 more elements

Dependencies are inferred from the claim text.

Method and device for measurements of optical samples by means of vision rays

Life of this patent

Method and device for measurements of optical samples by means of vision rays

Life of this patent

Abstract

Claims20