Electronic device supporting manufacture of semiconductor device and operating method of electronic device

An operating method of an electronic device which includes a processor and is configured to support manufacture of a semiconductor device, the method comprising:

• receiving, at the processor, layout data for manufacture of a second semiconductor device and feature data of the layout data;
• inferring, at the processor, a center and a distribution of a skew of each of patterns or edges of the layout data based on the layout data and the feature data, by using a deep learning module;
• performing, at the processor, Monte Carlo simulation based on the center of the skew and on the distribution of the skew;
• and
• modifying, at the processor, a layout image corresponding to the layout data based on a result of the Monte Carlo simulation,
• wherein the deep learning module is trained based on tabular data and on knowledge distillation.

An electronic device for manufacture of a semiconductor device, comprising:

• a processor;
• and
• a memory configured to store layout data associated with the manufacture of the semiconductor device, feature data of the layout data, and skew data after the semiconductor device is manufactured,
• wherein the processor is configured to execute a deep learning module to,
• infer a center and a distribution of a skew of each of patterns of the layout data, edges of the layout data, or both patterns and edges of the layout data, based on the layout data and the feature data,
• calculate a loss based on the center and the distribution of the skew and the skew data, and
• train the deep learning module based on the loss, and
• wherein the layout data, the feature data, and the skew data have a tabular format.