Substrate holding apparatus, substrate processing apparatus, separation method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsYUICHIRO MORIKUNI, SHIGEO KOYA, KAZUNORI NAKAJIMA, HIKARI WATANABE, DAISUKE OGAWA
Life of this patent
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Abstract
A substrate holding apparatus includes a holder configured to hold a substrate, and a gas supplier configured to supply a gas between the substrate and the holder, wherein when separating the substrate from the holder holding the substrate, the gas supplier supplies the gas based on information concerning an adhesive force between the substrate and the holder.
Claims19
A substrate holding apparatus comprising:
- a holder configured to hold a substrate;
- and
- a gas supplier configured to supply a gas between the substrate and the holder,
- wherein when separating the substrate from the holder holding the substrate, the gas supplier supplies the gas based on information concerning an adhesive force between the substrate and the holder.
A substrate processing apparatus comprising:
- a holder configured to hold a substrate;
- and
- a controller configured to control supply of a gas between the substrate and the holder,
- wherein when separating the substrate from the holder holding the substrate, the controller is configured to control supply of the gas based on information concerning an adhesive force between the substrate and the holder.
A separation method of separating a substrate from a holder holding the substrate, comprising:
- acquiring information concerning an adhesive force between the substrate and the holder;
- supplying a gas between the substrate and the holder based on the information concerning the adhesive force acquired in the acquiring;
- and
- separating the substrate from the holder after supply of the gas is started in the supplying.
An article manufacturing method comprising:
- forming a pattern on a substrate held by a holder;
- acquiring information concerning an adhesive force between the substrate and the holder;
- supplying, based on the information concerning the adhesive force acquired in the acquiring, a gas between the holder and the substrate with the pattern formed thereon in the forming;
- separating the substrate from the holder after supply of the gas is started in the supplying;
- processing the substrate separated in the separating;
- and
- manufacturing an article using the substrate processed in the processing.
Dependencies are inferred from the claim text.