US 2025/0093771 A1 · MOLD, MANUFACTURING METHOD, FILM FORMING METHOD, ARTICLE MANUFACTURING METHOD, AND IMPRINT APPARATUS

Abstract

A mold including a first part and a second part, wherein the first part includes a first surface and a second surface on an opposite side of the first surface, the second surface includes a concave portion having a concave shape, the first surface includes a convex portion and having a convex shape, the second part includes a third surface combined to the convex portion of the first part, and a fourth surface on the opposite side of the third surface, on which a pattern to be transferred to a transfer target is formed, the first part is made of a material having a first elastic modulus, and the second part is made of a material having a second elastic modulus lower than the first elastic modulus.

Claims13

Dependent claims

A mold comprising a first part and a second part, wherein

the first part includes a first surface including a plane, and a second surface on an opposite side of the first surface,
the second surface includes, at a center portion, a concave portion having a concave shape,
the first surface includes, at a center portion, a convex portion projecting from the plane and having a convex shape,
the second part includes a third surface combined to the convex portion of the first part, and a fourth surface on the opposite side of the third surface, on which a pattern to be transferred to a transfer target is formed,
the first part is made of a material having a first elastic modulus, and
the second part is made of a material having a second elastic modulus lower than the first elastic modulus.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

18/828,360Filed 9 Sep 2024

Priority

JP 2023-15028415 Sep 2023

Published

20 Mar 2025

Term ends

Not estimatedThe source records don’t support an estimate.

Classification11 codes

G03F 7/0002
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g.…
B29C 33/3842
Characterised by the material or the manufacturing process: manufacturing moulds, e.g. shaping the mould surface by machining
B29C 33/424
Characterised by the shape of the moulding surface, e.g. ribs or grooves: moulding surfaces provided with means for marking or patterning
B29C 43/021
Of articles of definite length, i.e. discrete articles: characterised by the shape of the surface

Mold, manufacturing method, film forming method, article manufacturing method, and imprint apparatus

Life of this patent

Mold, manufacturing method, film forming method, article manufacturing method, and imprint apparatus

Life of this patent

Abstract

Claims13