Anti-reflective edge coating
AssigneeApplied Materials, Inc.
InventorEvan WANG
Life of this patent
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Abstract
The present disclosure provides a waveguide combiner and methods thereof. The waveguide combiner includes a substrate having a top surface, a bottom surface, and an edge arrangement. The edge arrangement has at least a first angled surface. The first angled surface includes an angle of about 0.1° to about 90° relative to the top surface or the bottom surface of the substrate. A plurality of structures are disposed over the substrate. An anti-reflection composition is deposited on the first angled surface of the edge arrangement.
Claims20
A waveguide combiner, comprising:
- a substrate having a top surface, a bottom surface, and an edge arrangement, the edge arrangement having at least a first angled surface,
- wherein the first angled surface comprises an angle of about 0.1° to about 90° relative to the top surface or the bottom surface of the substrate;
- a plurality of structures disposed over the substrate;
- and
- an anti-reflection composition deposited on the first angled surface of the edge arrangement.
A waveguide combiner, comprising:
- a substrate having a top surface, a bottom surface, and an edge arrangement, the edge arrangement having a first angled surface and a second angled surface,
- wherein the first angled surface comprises an angle of about 0.1° to about 90° relative to the top surface of the substrate, and
- wherein the second angled surface comprises an angle of about 0.1° to about 90° relative to the bottom surface of the substrate;
- a plurality of structures disposed over the substrate;
- and
- an anti-reflection composition selectively deposited on the first angled surface and the second angled surface of the edge arrangement.
A waveguide combiner, comprising:
- a substrate having a top surface, a bottom surface, and an edge arrangement, the edge arrangement having a first angled surface, a second angled surface, and a third angled surface;
- wherein the first angled surface comprises an angle of about 0.1° to about 90° relative to the top surface of the substrate,
- wherein the second angled surface comprises an angle of about 0.1° to about 90° relative to the bottom surface of the substrate, and
- wherein the third angled surface comprises an angle of about 0.1° to about 90° relative to the top first angled surface or the second angled surface;
- a plurality of structures disposed over the substrate;
- and
- an anti-reflection composition selectively deposited on the first angled surface, the second angled surface, and the third angled surface of the edge arrangement.
A method, comprising:
- producing a formulation;
- applying the formulation on a first angled surface of a waveguide combiner using an edge tool, wherein the first angled surface comprises an angle of about 0.1° to about 90° relative to a top surface or a bottom surface of a substrate of the waveguide combiner;
- and
- curing the formulation to form an anti-reflection composition.
Dependencies are inferred from the claim text.