Laser irradiation method and laser irradiation apparatus

Abstract

A laser irradiation apparatus including: a photonic crystal surface emitting laser (PCSEL) element configured to emit a laser beam; a laser head configured to focus the laser beam emitted from the PCSEL element by a focusing lens thereof in an optical transmission path by spatial propagation; and a moving mechanism configured to irradiate the laser beam focused by the focusing lens onto an object to be irradiated with the laser beam at any irradiation position within a Rayleigh length range regardless of a beam waist position of the laser beam in an optical axis direction by a movement of the focusing lens relative to the object to be irradiated along the optical axis direction of the laser beam.

Dependencies are inferred from the claim text.