Vertical grating coupler
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTai-Chun Huang, Stefan Rusu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTai-Chun Huang, Stefan Rusu
Estimating the term…
A vertical grating coupler is disclosed. The grating coupler includes a first waveguide having a first grating, a second waveguide having a second grating, and a dielectric layer positioned between the first waveguide and the second waveguide. The first grating includes a plurality of first grating ridges separated by a plurality first grating gaps, and the second grating includes a plurality of second grating ridges separated by a plurality second grating gaps. The first grating, the second grating, and the dielectric layer are located in a vertical overlap region between the first waveguide and the second waveguide. The first grating and the second grating have different grating periods, and each of the plurality of first grating gaps and second grating gaps are filled with the dielectric layer.
A method for fabricating a vertical grating coupler, comprising:
A vertical grating coupler, comprising:
A method for using a vertical grating coupler, comprising:
Dependencies are inferred from the claim text.