Methods for fabricating surface-relief grating based architectures using fusion bonding

Abstract

A method of fabricating a layered waveguide display comprises imprinting a surface-relief grating (SRG) on a first substrate, filling grating grooves of the SRG with a backfill material, depositing a first layer of an index-matching material on the SRG, and bonding the first layer of the index-matching material on the SRG to a first side of a second substrate. The first substrate and the SRG are characterized by a first refractive index and a second refractive index, respectively. The backfill material is characterized by a third refractive index greater than the first refractive index and the second refractive index. The index-matching material is characterized by a fourth refractive index greater than the first refractive index and the second refractive index. In some embodiments, the backfill material is the same as the index-matching material. The second substrate is characterized by a fifth refractive index matching the fourth refractive index.

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