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US 2025/0093412 A1Published application
Probe structure for micro device inspection
AssigneeVueReal Inc.
InventorsGholamreza CHAJI, Chang Ho PARK
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Abstract
What is disclosed are methods and structures of an improved probe card assembly to inspect micro devices.
Claims9
A method to test an array of micro devices comprising:
- providing an array of probes in a probe card;
- aligning the array of probes with corresponding micro devices on a substrate;
- moving the probe card to the micro devices;
- biasing one or more probes to allow measuring of at least one attribute of the at least one micro device;
- monitoring a change in at least one attribute of the micro device;
- and
- detecting the connection to the micro device through the change in at least one attribute of the micro device.
4 more elements
A method of flattening a wafer of micro devices for testing, comprising:
- at least one brace provided for at least one probe unit connected to the wafer;
- a corresponding area in the wafer aligned to the at least one brace that has no micro device to test;
- pushing the corresponding area with the brace.
Dependencies are inferred from the claim text.