Prober, performance board, probe card, and substrate inspecting apparatus
AssigneeKioxia Corporation
InventorHiroki KAMATA
Life of this patent
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Abstract
In one embodiment, a prober includes a stage configured to hold a substrate as an inspection object. The prober further includes a housing configured to hold a probe card that can be electrically connected to the substrate, and hold a performance board that can be electrically connected to the probe card. Moreover, the housing is configured to function as a ground line, and includes a connection path configured to electrically connect the probe card and the performance board.
Claims20
A prober comprising:
- a stage configured to hold a substrate as an inspection object;
- and
- a housing configured to hold a probe card that can be electrically connected to the substrate, and hold a performance board that can be electrically connected to the probe card,
- wherein the housing is configured to function as a ground line, and includes a connection path configured to electrically connect the probe card and the performance board.
A performance board that can be electrically connected to a substrate as an inspection object via a probe card, comprising:
- a first line configured to function as a ground line;
- and
- a first line connecting portion configured to electrically connect the first line to a housing of a prober configured to hold the substrate.
A probe card that can be electrically connected to a substrate as an inspection object, comprising:
- a second line configured to function as a ground line;
- and
- a second line connecting portion configured to electrically connect the second line to a housing of a prober configured to hold the substrate.
A substrate inspecting apparatus comprising:
- a probe card that can be electrically connected to a substrate as an inspection object;
- a tester including a performance board that can be electrically connected to the probe card;
- and
- a prober including a stage configured to hold the substrate, and a housing configured to hold the probe card and the performance board,
- wherein the housing is configured to function as a ground line, and includes a connection path configured to electrically connects the probe card and the performance board.
Dependencies are inferred from the claim text.