Semiconductor failure analysis device

A semiconductor failure analysis device that analyzes for a failure portion included in a semiconductor device using a response to a stimulation signal, the semiconductor failure analysis device comprising:

• a signal generator configured to apply a stimulation signal to the semiconductor device;
• a light source configured to generate irradiation light with which the semiconductor device is irradiated;
• a solid immersion lens disposed on an optical path of the irradiation light;
• a light detector configured to receive reflected light generated by the irradiation light being reflected by the semiconductor device and to output a detection signal according to the reflected light;
• an optical system disposed between the light source and the solid immersion lens to emit the irradiation light to the semiconductor device via the solid immersion lens and disposed between the solid immersion lens and the light detection unit to emit the reflected light received via the solid immersion lens to the light detection unit;
• and
• an analyzer configured to obtain information on a failure portion of the semiconductor device from the detection signal,
• wherein the light source emits the irradiation light having a center wavelength of 880 nm or more and 980 nm or less, and
• wherein the solid immersion lens is formed of gallium arsenide (GaAs).