Detection of surface particles on chamber components with carbon dioxide

A system comprising:

• a memory;
• and
• a set of one or more processing devices coupled to the memory, wherein the set of one or more processing devices is to:
• cause a distribution unit of a particle detection system to initiate a particle collection process to dislodge surface particles from a surface of an article based on a stream comprising at least one of solid carbon dioxide (CO2) particles or CO2 droplets directed toward the article, wherein a portion of the dislodged surface particles are collected by a particle sampling component that determines, for collected particles and in real-time, at least one of a particle number concentration, a particle size, or a particle size distribution;
• determine, based on a signal received by the particle sampling component, that the at least one of the particle number concentration, the particle size, or the particle size distribution of the portion of the dislodged surface particles satisfies one or more collection criteria;
• and
• cause the distribution unit of the particle detection system to terminate the particle collection process.

A particle detection system comprising:

• a distribution unit configured to direct a stream comprising at least one of solid carbon dioxide (CO2) particles or CO2 droplets directed toward an article;
• a particle sampling component configured to determine, for collected particles and in real-time, at least one of a particle number concentration, a particle size, or a particle size distribution;
• and
• a set of one or more processing devices, wherein the set of one or more processing devices is to:
• cause the distribution unit to initiate a particle collection process to dislodge surface particles from a surface of the article based on the stream comprising at least one of solid carbon dioxide (CO2) particles or CO2 droplets directed toward the article, wherein a portion of the dislodged surface particles are collected by the particle sampling component
• determine, based on a signal received by the particle sampling component, that the at least one of the particle number concentration, the particle size, or the particle size distribution of the portion of the dislodged surface particles satisfies one or more collection criteria;
• and
• cause the distribution unit of the particle detection system to terminate the particle collection process.