Optical apparatus, optical inspection system, and method for imaging object

Abstract

According to one embodiment, an optical apparatus includes at least two light sources, illumination opening portions, and an imaging portion. The illumination opening portions are configured to partially block light emitted from the at least two light sources, respectively, to form illumination light. The imaging portion is configured to image an object using the illumination light. The at least two light sources are disposed at positions facing each other with an optical axis of the imaging portion interposed between the at least two light sources. The illumination light from the at least two light sources is formed to spread like a fan shape toward the object respectively by the illumination opening portions. The fan shape is defined on a reference plane including the optical axis of the imaging portion and on another plane parallel to the reference plane.

Dependencies are inferred from the claim text.