Structure position sensing device and mems scanner package including the same

A MEMS scanner package comprising:

• a MEMS scanner element including a mirror;
• a first circuit board on which the MEMS scanner element is mounted;
• a light source placed to be spaced apart from a rear of the mirror of the MEMS scanner element by a predetermined interval and emitting light to a rear side of the mirror;
• a lens which is positioned between the light source and the mirror, and through which the light emitted from the light source passes;
• a detector which receives light which passes through the lens, and then is reflected from the rear side of the mirror;
• and
• a second circuit board on which the light source and the detector are mounted, and which is electrically connected to each of the light source and the detector,
• wherein a center of the lens is placed to be spaced apart from an emission center of the light source.

A structure position sensing device comprising:

• a measured body;
• a light source placed to be spaced apart from a rear of the measured body by a predetermined interval and emitting light to a rear side of the measured body;
• a detector which receives light which is emitted from the light source, and reflected from the rear side of the measured body;
• and
• an integrated support which has a first surface supporting the light source and a second surface supporting the detector, and is tilted at a predetermined angle so that the first surface and the second surface face each other,
• wherein the light emitted from the light source is incident on the rear side of the measured body at a tilting angle other than in a normal incidence.

A MEMS scanner package comprising:

• a MEMS scanner element including a mirror;
• a circuit board on which the MEMS scanner element is mounted;
• a light source placed to be spaced apart from a rear of the mirror of the MEMS scanner element by a predetermined interval and emitting light to a rear side of the mirror;
• a detector which receives light which is emitted from the light source, and reflected from the rear side of the mirror;
• and
• an integrated support which has a first surface supporting the light source and a second surface supporting the position sensitive detector, and is tilted at a predetermined angle so that the first surface and the second surface face each other,
• wherein the light emitted from the light source is incident on the rear side of the mirror at a tilting angle other than in a normal incidence.