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US 2025/0092953 A1Published application
High conductance variable orifice valve
AssigneeApplied Materials, Inc.
InventorsMuhannad Mustafa, Sanjeev Baluja
Life of this patent
Estimating the term…
Abstract
Variable orifice valves comprising a first fixed plate, a second fixed plate and a movable plate between are described. The movable plate is connected to the first fixed plate and the second fixed plate by sealing elements. The movable plate is moved closer to or further from the first fixed plate by rotation of an actuator ring that rotates at least two rotary elements connected to the movable plate. A needle on the movable plate engages an opening in the valve to seal or open the valve to allow fluid flow. Methods of controlling flow of fluid through the variable orifice valve are also described.
Claims20
A variable orifice valve comprising:
- a first fixed plate at a first end of the valve, the first fixed plate having a first side and a second side defining a first fixed plate thickness, the first fixed plate having an opening extending through the first fixed plate thickness;
- a second fixed plate at a second end of the valve, the second fixed plate having a first side and a second side defining a second fixed plate thickness, the second fixed plate having an opening extending through the second fixed plate thickness, the first side of the second fixed plate facing and spaced from the second side of the first fixed plate;
- a movable plate positioned between the first fixed plate and the second fixed plate, the movable plate having a first side and a second side defining a movable plate thickness, the first side of the movable plate facing the second side of the first fixed plate and the second side of the movable plate facing the first side of the second fixed plate, the movable plate having a needle extending from the first side of the movable plate, the needle having a needle end sized to fit within the opening in the first fixed plate, the movable plate having at least one opening extending through the movable plate thickness adjacent the needle;
- a first sealing element between the first fixed plate and the movable plate;
- a second sealing element between the second fixed plate and the movable plate;
- an actuator ring adjacent the first fixed plate, the actuator ring having a plurality of inwardly directed engagement elements on an inside surface thereof;
- at least two rotary elements within the actuator ring, each of the rotary elements having a plurality of outwardly directed engagement elements on an outside surface thereof, each of the outward directed engagement elements configured to cooperatively interact with the inwardly directed engagement elements of the actuator ring;
- and
- at least one connector between the first fixed plate and the movable plate, the at least one connector configured to move the movable plate upon rotation of an actuator ring.
6 more elements
A variable orifice valve comprising:
- a first fixed plate at a first end of the valve, the first fixed plate having a first side and a second side defining a first fixed plate thickness, the first fixed plate having an opening extending through the first fixed plate thickness;
- a second fixed plate at a second end of the valve, the second fixed plate having a first side and a second side defining a second fixed plate thickness, the second fixed plate having an opening extending through the second fixed plate thickness, the first side of the second fixed plate facing and spaced from the second side of the first fixed plate;
- a movable plate positioned between the first fixed plate and the second fixed plate, the movable plate having a first side and a second side defining a movable plate thickness, the first side of the movable plate facing the second side of the first fixed plate and the second side of the movable plate facing the first side of the second fixed plate, the movable plate having a needle extending from the first side of the movable plate, the needle having a needle end sized to fit within the opening in the first fixed plate, the movable plate having at least one opening extending through the movable plate thickness adjacent the needle, the needle end having a conical shape with a maximum width sized to contact the second side of the first fixed plate at the opening to form a seal;
- a first sealing element between the first fixed plate and the movable plate, the first sealing element comprising a bellows;
- a second sealing element between the second fixed plate and the movable plate, the second sealing element comprising a bellows;
- an actuator ring adjacent the first fixed plate, the actuator ring having a plurality of inwardly directed engagement elements on an inside surface thereof;
- at least three rotary elements within the actuator ring, each of the rotary elements having a plurality of outwardly directed engagement elements on an outside surface thereof, each of the outward directed engagement elements configured to cooperatively interact with the inwardly directed engagement elements of the actuator ring;
- at least one connector between the first fixed plate and the movable plate, the at least one connector configured to move the movable plate upon rotation of an actuator ring;
- a first conduit extending from the first side of the first fixed plate, the first conduit having a threaded end and outwardly facing engagement elements configured to cooperatively interact with the outwardly directed engagement elements of the at least three rotary elements;
- and
- a second conduit extending from the second side of the second fixed plate, the second conduit having a threaded end,
- wherein movement of the actuator ring around a central axis causes each of the rotary elements to rotate around a rotary element axis while remaining in a fixed location relative to the first conduit.
9 more elements
Dependencies are inferred from the claim text.