Resonator, resonator assembly, filter, electronic device, method for fabricating resonator and packaging structure

Abstract

A resonator, a resonator assembly, a filter, an electronic device, a method for fabricating the resonator, and a packaging structure are provided. The bulk acoustic resonator includes a substrate, a first electrode, a second electrode, an acoustic reflection structure between the first electrode and the substrate, and a piezoelectric layer arranged between the second electrode and the first electrode. In a direction perpendicular to the substrate, an overlapping region of the acoustic reflection structure, the first electrode, the piezoelectric layer and the second electrode is an active region that is annular. A distance from a point A on an inner edge of the active region to a center of the resonator is D, and a shortest distance from A to an outer edge of the active region is W, where 0.1≤W/D≤10. The heat dissipation rate of the resonator can be improved by modifying W.

Dependencies are inferred from the claim text.