Methods and apparatuses for microfabrication and laser writing alignment

A method of alignment, comprising:

• generating one or more microfabrication alignment patterns on a wafer;
• generating one or more laser-to-microfabrication alignment patterns on the wafer, wherein at least one of a distance or an orientation between the one or more microfabrication alignment patterns and the one or more laser-to-microfabrication alignment patterns is predetermined;
• aligning one or more laser writing processes to the one or more laser-to-microfabrication alignment patterns;
• laser writing features into the wafer based on the alignment of the one or more laser writing processes;
• aligning one or more microfabrication processes to the one or more microfabrication alignment patterns;
• and
• processing the wafer via microfabrication steps based on the alignment of the one or more microfabrication processes.