Lidar systems with mems micromirrors and micromirror arrays

Abstract

A Light Detection and Ranging (LiDAR) system, comprising: a light emitting unit comprising a light source comprising one or more laser emitters for generating one or more laser beams for producing reflected photons off of a target; a scanning unit comprising a Micro-Electro-Mechanical Systems (MEMS) mirror for changing an outgoing direction of the one or more laser beams; a light receiving unit comprising a MEMS mirror array and a plurality of photon detectors, the MEMS mirror array being configured to deflect the reflected photons to the plurality of photon detectors; and a control system for controlling the LiDAR system, the control system being configured to adjust the MEMS mirror and the MEMS mirror array.

Dependencies are inferred from the claim text.