Information processing device, display and input device, and program
AssigneeTokyo Electron Limited
InventorKazunari ISHII
Life of this patent
Estimating the term…
Abstract
With respect to an information processing device for setting polishing content of probes configured to contact devices under test, the information processing device includes a processor; and a memory storing program instructions that cause the processor to set a polishing area in a polishing member configured to polish the probes; set an operation pattern to be used during the polishing of the probes; and calculate a relative trajectory between the polishing member and the probes based on the set polishing area and the set operation pattern.
Claims12
An information processing device for setting polishing content of probes configured to contact devices under test, comprising:
- a processor;
- and
- a memory storing program instructions that cause the processor to:
- set a polishing area in a polishing member configured to polish the probes;
- set an operation pattern to be used during the polishing of the probes;
- and
- calculate a relative trajectory between the polishing member and the probes based on the set polishing area and the set operation pattern.
A display and input device comprising a display screen for displaying polishing content of probes configured to contact devices under test, the display and input device being configured to set the polishing content by a user's operation on the display screen,
- wherein the display screen includes:
- an area setting screen for setting a polishing area in a polishing member configured to polish the probes;
- a pattern setting screen for setting an operation pattern to be used during the polishing of the probes;
- and
- a simulation display screen for displaying a relative trajectory between the polishing member and the probes, the relative trajectory being calculated based on the set polishing area and the set operation pattern.
A non-transitory computer-readable recording medium having stored therein a program for setting polishing content of probes configured to contact devices under test, the program causing an information processing device to perform:
- setting a polishing area in a polishing member configured to polish the probes;
- setting an operation pattern to be used during the polishing of the probes;
- and
- calculating a relative trajectory between the polishing member and the probes based on the set polishing area and the set operation pattern.
Dependencies are inferred from the claim text.