Resistive hydrogen sensor comprising sensing layer having semiconducting single-walled carbon nanotubes, and manufacturing method therefor

Abstract

A resistive hydrogen sensor comprising a sensing layer having semiconducting single-walled carbon nanotubes (SWCNTs), and a manufacturing method therefor are disclosed. The hydrogen sensor comprises: a substrate; a sensing layer, which is formed on the substrate and comprises semiconducting SWCNTs; and electrodes formed on the surface of the sensing layer in the direction opposite to the direction facing the substrate, or formed between the sensing layer and the substrate, and spaced from each other, and thus has a sensitivity of 5% or higher and a response time of two seconds or less with respect to a hydrogen gas having a hydrogen concentration of 4 vol % in comparison to when there is no hydrogen, and can be operated at a low temperature.

Dependencies are inferred from the claim text.