Detection apparatus and detection method

A detection apparatus, comprising:

• an electromagnetic wave transceiver module,
• wherein the electromagnetic wave transceiver module is configured to transmit a measurement electromagnetic wave to a first doped surface and a second doped surface of a to-be-detected material, and receive a third electromagnetic wave and a fourth electromagnetic wave, wherein the third electromagnetic wave comprises the measurement electromagnetic wave reflected from the first doped surface and the second doped surface, and the fourth electromagnetic wave comprises the measurement electromagnetic wave transmitting through the to-be-detected material;
• and
• the electromagnetic wave transceiver module is further configured to obtain electrical characteristic parameters of the first doped surface and the second doped surface of the to-be-detected material and an electrical characteristic parameter of the body of the to-be-detected material based on the third electromagnetic wave and the fourth electromagnetic wave.

A detection method, comprising:

• transmitting a measurement electromagnetic wave to a surface of a side of a to-be-detected material;
• and
• receiving a first electromagnetic wave and a second electromagnetic wave, and obtaining, based on the first electromagnetic wave and the second electromagnetic wave, an electrical characteristic parameter of the surface and/or a body of the to-be-detected material that are irradiated by the measurement electromagnetic wave,
• wherein the first electromagnetic wave comprises the measurement electromagnetic wave reflected by the surface of the to-be-detected material, and the second electromagnetic wave comprises the measurement electromagnetic wave transmitting through the to-be-detected material.