Highly sensitive hybrid response capacitive pressure sensor
AssigneeBoard of Regents, The University of Texas System
InventorNanshu LU
Life of this patent
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Abstract
Described herein is a flexible hybrid response pressure sensor (HRPS) composed of an electrically conductive porous nanocomposite (PNC) laminated with an ultrathin dielectric layer, resulting in significantly enhanced sensitivities (i.e., more than 400%) over wide pressure ranges, from 3.13 kPa-1 within 0-1 kPa to 0.43 kPa-1 within 30-50 kPa. In some aspects, the PNC is composed of carbon nanotubes (CNT) and a low viscosity and flexible, strong, and elastic rubber (e.g., Ecoflex™ (Smooth-On, Inc., Macungie, PA-Ecoflex™ is a platinum-catalyzed silicone)), and the ligaments of the PNC are electrically conductive due to adequate CNT doping.
Claims18
A flexible hybrid response capacitive pressure sensor comprising:
- an electrically conductive porous nanocomposite (PNC) layer having a first surface and a second surface, wherein the first surface and the second surface are separated by a thickness of the electrically conductive porous nanocomposite layer;
- an insulating layer, wherein the insulating layer covers and is in contact with at least a portion of the first surface of the PNC layer;
- a first electrode, wherein the first electrode is in contact with a top surface of the insulating layer;
- and
- a second electrode, wherein the second electrode is in contact with at least a portion of the second surface of the PNC layer,
- wherein the PNC layer exhibits hybrid piezoresistive and piezocapacitive responses, resulting in significantly enhanced sensitivities over wide pressure ranges.
A method of fabricating a flexible hybrid response capacitive pressure sensor comprising:
- forming an electrically conductive porous nanocomposite (PNC) layer having a first surface and a second surface, wherein the first surface and the second surface are separated by a thickness of the electrically conductive porous nanocomposite layer;
- attaching an insulating layer to the first surface of the PNC layer, wherein the insulating layer covers and is in contact with at least a portion of the first surface of the PNC layer;
- attaching a first electrode to a top surface of the insulating layer, wherein the first electrode is in contact with at least a portion of the top surface of the insulating layer;
- and
- attaching a second electrode to the second surface of the PNC layer, wherein the second electrode is in contact with at least a portion of the second surface of the PNC layer,
- wherein the PNC layer exhibits hybrid piezoresistive and piezocapacitive responses, resulting in significantly enhanced sensitivities over wide pressure ranges.
Dependencies are inferred from the claim text.