US 2025/0085102 A1Published application

Measurement device and measurement method

AssigneeKioxia Corporation

InventorsShutaro OTSUKA, Takuji OHASHI, Kazuyuki MASUKAWA, Takaki HASHIMOTO

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Abstract

A measurement device includes a first light source configured to generate first light; a first beam splitter configured to split the first light into second light and third light; and a detector configured to receive signal light generated from a subject through irradiating the subject with the second light and the third light. The first light has a wavelength transmittable through a substrate. The second light is vertically incident on a surface of a first film formed on the subject. The third light is vertically incident on a rear surface of the substrate to be coaxial with the second light. A phase of transmitted light through the substrate is opposite to a phase of reflected light. An intensity of the transmitted light is equal to an intensity of the reflected light.

Claims20

Dependent claims

A measurement device, comprising:

a first light source configured to generate first light;
a first beam splitter configured to split the first light into second light and third light;
and
a detector configured to receive signal light generated from a subject through irradiating the subject with the second light and the third light,
wherein the first light has a wavelength transmittable through a substrate,
the second light is vertically incident on a surface of a first film formed on the subject,
the third light is vertically incident on a rear surface of the substrate to be coaxial with the second light,
a phase of transmitted light transmitted through the substrate among the third light is opposite to a phase of reflected light generated by a part of the second light being transmitted through the first film and being reflected on a front surface of the substrate, and
an intensity of the transmitted light is substantially equal to an intensity of the reflected light.

6 more elements

A measurement method, comprising:

generating first light having a wavelength transmittable through a substrate;
splitting the first light into second light and third light;
causing the second light to be vertically incident on a surface of a first film formed on the substrate;
causing the third light to be vertically incident on a rear surface of the substrate to be coaxial with the second light;
adjusting respective intensities and respective delay times of the second light and the third light, such that transmitted light transmitted through the substrate among the third light and reflected light generated by a part of the second light being transmitted through the first film and being reflected on a front surface of the substrate have opposite phases to each other and a complementary intensity relationship;
detecting signal light generated from a subject including the first film through irradiating the subject with the second light and the third light;
and
monitoring the surface of the first film based on the signal light.

5 more elements

Dependencies are inferred from the claim text.