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AssigneeSuzhou Maizheng Technology Co., Ltd.
InventorsYanan LIU, Bin ZHANG, Chen CHEN, Dengzhi WANG, Huan LIU
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The present invention belongs to the technical field of PECVD devices. Disclosed are a drooping cover plate and a PECVD device having the drooping cover plate. In the drooping cover plate of the present invention, a first insulating frame is arranged on a bottom plate frame, and a second insulating frame is arranged on the first insulating frame; the bottom plate frame is formed of several bottom plates connected to each other, a lower side face of each bottom plate is provided with an extension portion that is perpendicular to the lower side face of the bottom plate; the first insulating frame is formed of several first insulating plates joined together, and the second insulating frame is formed of several second insulating plates joined together; and several strip-shaped holes communicating an inner side and an outer side of the bottom plate frame are formed.
A pendent shield frame, comprising a bottom plate frame, a first insulating frame, and a second insulating frame, wherein the first insulating frame is provided on the bottom plate frame, the second insulating frame is provided on the first insulating frame, the bottom plate frame is formed by connecting a plurality of bottom plates, a lower side of the bottom plate is provided with an extending portion perpendicular to the lower side of the bottom plate, the first insulating frame is formed by splicing a plurality of first insulating plates, the second insulating frame is formed by splicing a plurality of second insulating plates, an upper side of the bottom plate is in contact with a lower side of the first insulating plate, and an upper side of the first insulating plate is in contact with a lower side of the second insulating plate, thereby forming a plurality of strip-shaped holes communicating inner and outer sides of the bottom plate frame, and a height of the strip-shaped hole in a thickness direction of the bottom plate frame is 1 mm to 20 mm.
A pendent shield frame, comprising a bottom plate frame and an insulating frame provided on the bottom plate frame, wherein the bottom plate frame is formed by connecting a plurality of bottom plates, a lower side of the bottom plate is provided with an extending portion perpendicular to the lower side of the bottom plate, the insulating frame is formed by splicing a plurality of insulating plates, an upper side of the bottom plate is in contact with a lower side of the insulating plate, the insulating plate is integrally formed and processed, a plurality of strip-shaped holes communicating inner and outer sides of the bottom plate frame are formed in an interior of the insulating plate, and a height of the strip-shaped hole in a thickness direction of the bottom plate frame is 1 mm to 20 mm.
Dependencies are inferred from the claim text.