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US 2025/0083331 A1Published application
Substrate holding hand and substrate conveyor robot
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorShinya KINOSHITA
Life of this patent
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Abstract
A substrate-holding hand includes a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other; and a support mechanism for supporting the plurality of blades. Each of the plurality of blades is connected to the support mechanism by an eccentric element.
Claims9
A substrate-holding hand comprising:
- a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other;
- and
- a support mechanism for supporting the plurality of blades, wherein
- each of the plurality of blades is connected to the support mechanism by an eccentric element.
1 more element
A substrate-conveying robot comprising:
- a robot arm;
- and
- a substrate-holding hand arranged in a distal end part of the robot arm, wherein
- the substrate-holding hand includes
- a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other, and
- a support mechanism for supporting the plurality of blades, and
- each of the plurality of blades is connected to the support mechanism by an eccentric element.
4 more elements
Dependencies are inferred from the claim text.