Process kit alignment method for improving semiconductor yield
AssigneeApplied Materials, Inc.
InventorsDamon K. Cox, Ali Utku Pehlivan, Paul Benjamin Reuter
Life of this patent
Estimating the term…
Abstract
A method includes causing an upper process kit ring to be removed from a lower process kit ring. The method further includes, responsive to causing the upper process kit ring to be removed from the lower process kit ring, causing, based on sensor data, a first position correction associated with the lower process kit ring. The method further includes, responsive to the first position correction, causing the upper process kit ring to be disposed on the lower process kit ring.
Claims20
A method comprising:
- causing an upper process kit ring to be removed from a lower process kit ring;
- responsive to the causing of the upper process kit ring to be removed from the lower process kit ring, causing, based on sensor data, a first position correction associated with the lower process kit ring;
- and
- responsive to the first position correction, causing the upper process kit ring to be disposed on the lower process kit ring.
A non-transitory computer-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
- causing an upper process kit ring to be removed from a lower process kit ring;
- responsive to the causing of the upper process kit ring to be removed from the lower process kit ring, causing, based on sensor data, a first position correction associated with the lower process kit ring;
- and
- responsive to the first position correction, causing the upper process kit ring to be disposed on the lower process kit ring.
A system comprising:
- a memory;
- and
- a processing device coupled to the memory, the processing device to:
- cause an upper process kit ring to be removed from a lower process kit ring;
- responsive to causing the upper process kit ring to be removed from the lower process kit ring, cause, based on sensor data, a first position correction associated with the lower process kit ring;
- and
- responsive to the first position correction, cause the upper process kit ring to be disposed on the lower process kit ring.
Dependencies are inferred from the claim text.