System and robot
AssigneeKabushiki Kaisha Yaskawa Denki
InventorsHiroki SANEMASA, Yoshiki KIMURA, Satoshi SUEYOSHI, Ryosuke WATANABE, Teppei MATSUO
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AssigneeKabushiki Kaisha Yaskawa Denki
InventorsHiroki SANEMASA, Yoshiki KIMURA, Satoshi SUEYOSHI, Ryosuke WATANABE, Teppei MATSUO
Estimating the term…
Provided is a system including: a housing having a front wall including a plurality of openings for access to a cassette storing a wafer and a back wall facing the front wall; and a robot arranged in the housing, in which the robot has a first base, a first movable portion, a second movable portion having a hand holding the wafer, and a control unit which controls the first movable portion and the second movable portion, and the plurality of openings are positioned in a maximum accessible region of the hand determined based on a position where the robot is arranged in the housing, a length of the first movable portion in a state where the first movable portion is maximally extended, and a length of the second movable portion in a state where the second movable portion is maximally extended.
A system comprising:
A robot arranged in a housing having a front wall having a plurality of openings for access to a cassette storing a wafer and a back wall facing the front wall, the robot comprising:
Dependencies are inferred from the claim text.